Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration - Laconte, J.; Flandre, D.; Raskin, J. -P.; SpringerLink (Online service) (Boston, MA : Springer US, 2006)
Keywords: Engineering; Particles (Nuclear physics).; Physical optics; Electronics; Systems engineering; Surfaces (Physics).; Engineering; Physics and Applied Physics in Engineering; Electronics and Microelectronics, Instrumentation; Circuits and Systems; Solid State Physics and Spectroscopy; Applied Optics, Optoelectronics, Optical Devices; Surfaces and Interfaces, Thin Films