Introductory MEMS Fabrication and Applications - Adams, Thomas M.; Layton, Richard A.; SpringerLink (Online service) (Boston, MA : Springer US, 2010)
Keywords: Engineering; Mechanics; Materials; Electronics; Systems engineering; Surfaces (Physics).; Engineering; Electronics and Microelectronics, Instrumentation; Circuits and Systems; Mechanics; Surfaces and Interfaces, Thin Films; Continuum Mechanics and Mechanics of Materials