Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators [electronic resource] / edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
By: Gusev, Evgeni.
Contributor(s): Garfunkel, Eric | Dideikin, Arthur | SpringerLink (Online service).
Material type:
BookSeries: NATO Science for Peace and Security Series B: Physics and Biophysics.Publisher: Dordrecht : Springer Netherlands, 2010Description: digital.ISBN: 9789048138074.Subject(s): Chemistry | Microreactors | Mechanics | Mechanical engineering | Engineering | Microwaves | Chemistry | Microengineering | Nanotechnology and Microengineering | Mechanics | Mechanical Engineering | Microwaves, RF and Optical EngineeringDDC classification: 660.6 Online resources: Click here to access online
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