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Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.

By: Büttgenbach, Stephanus.
Contributor(s): Burisch, Arne | Hesselbach, Jürgen | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Microtechnology and MEMS.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011Description: digital.ISBN: 9783642129032.Subject(s): Engineering | Structural control (Engineering) | Nanotechnology | Engineering | Nanotechnology and Microengineering | Mechatronics | Operating Procedures, Materials Treatment | NanotechnologyDDC classification: 620.5 Online resources: Click here to access online In: Springer eBooks
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