Sputtering by Particle Bombardment [electronic resource] : Experiments and Computer Calculations from Threshold to MeV Energies / edited by Rainer Behrisch, Wolfgang Eckstein.
By: Behrisch, Rainer.
Contributor(s): Eckstein, Wolfgang | SpringerLink (Online service).
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BookSeries: Topics in Applied Physics, 110.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007Description: digital.ISBN: 9783540445029.Subject(s): Chemistry | Plasma (Ionized gases) | Surfaces (Physics) | Chemistry | Surfaces and Interfaces, Thin Films | Atoms and Molecules in Strong Fields, Plasma PhysicsOnline resources: Click here to access online
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