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Gettering Defects in Semiconductors [electronic resource] / by Victor A. Perevoschikov, Vladimir D. Skoupov.

By: Perevoschikov, Victor A.
Contributor(s): Skoupov, Vladimir D | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Springer Series in Advanced Microelectronics, 19.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005Description: digital.ISBN: 9783540294993.Subject(s): Chemistry | Chemical engineering | Optical materials | Chemistry | Optical and Electronic Materials | Industrial Chemistry/Chemical EngineeringOnline resources: Click here to access online In: Springer eBooks
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