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Integrated Chemical Microsensor Systems in CMOS Technology [electronic resource] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.

By: Hierlemann, Andreas.
Contributor(s): Baltes, H | Fujita, Hiroyuki | Liepmann, Dorian | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Microtechnology and MEMS.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005Description: digital.ISBN: 9783540273721.Subject(s): Chemistry | Analytical biochemistry | Weights and measures | Electronics | Optical materials | Nanotechnology | Surfaces (Physics) | Chemistry | Nanotechnology | Analytical Chemistry | Optical and Electronic Materials | Surfaces and Interfaces, Thin Films | Measurement Science, Instrumentation | Electronics and Microelectronics, InstrumentationOnline resources: Click here to access online In: Springer eBooks
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