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MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.

By: Hartzell, Allyson L.
Contributor(s): da Silva, Mark G | Shea, Herbert R | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: MEMS Reference Shelf.Publisher: Boston, MA : Springer US, 2011Edition: 1.Description: digital.ISBN: 9781441960184.Subject(s): Engineering | Electronics | Engineering | Electronics and Microelectronics, InstrumentationDDC classification: 621.381 Online resources: Click here to access online In: Springer eBooks
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