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MEMS/NEMS [electronic resource] : Handbook Techniques and Applications / edited by Cornelius T. Leondes.

By: Leondes, Cornelius T.
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Boston, MA : Springer US, 2006Description: digital.ISBN: 9780387257860.Subject(s): Chemistry | Mechanical engineering | Engineering design | Electronics | Optical materials | Nanotechnology | Chemistry | Nanotechnology | Electronics and Microelectronics, Instrumentation | Mechanical Engineering | Engineering Design | Optical and Electronic MaterialsOnline resources: Click here to access online In: Springer eBooks
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