Entry Meeting Name

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 19203

003 - CONTROL NUMBER IDENTIFIER

• control field: KEPU

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20120123153731.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 120123|||a|||||| | ||| d

040 ## - CATALOGING SOURCE

• Original cataloging agency: KEPU
• Transcribing agency: KEPU

111 ## - HEADING--MEETING NAME

• Meeting name or jurisdiction name as entry element: International Conference on the Science and Technology of Defect Control in Semiconductors
• Date of meeting: (1989 :
• Location of meeting: Yokohama-shi, Japan)

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (KEPU)28991: International Conference on the Science and Technology of Defect Control in Semiconductors (1989 : Yokohama-shi, Japan), Defect control in semiconductors :, 1990.