Microsystems and Nanotechnology (Record no. 101895)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03718nam a22004455i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-642-18293-8 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20140220083256.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 120830s2012 gw | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783642182938 |
| -- | 978-3-642-18293-8 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1007/978-3-642-18293-8 |
| Source of number or code | doi |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | T174.7 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA418.9.N35 |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | TBN |
| Source | bicssc |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | TEC027000 |
| Source | bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI050000 |
| Source | bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 620.115 |
| Edition number | 23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Zhou, Zhaoying. |
| Relator term | editor. |
| 245 10 - TITLE STATEMENT | |
| Title | Microsystems and Nanotechnology |
| Medium | [electronic resource] / |
| Statement of responsibility, etc | edited by Zhaoying Zhou, Zhonglin Wang, Liwei Lin. |
| 264 #1 - | |
| -- | Berlin, Heidelberg : |
| -- | Springer Berlin Heidelberg : |
| -- | Imprint: Springer, |
| -- | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | XXII, 1004 p. |
| Other physical details | online resource. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Part 1.The Fundamentals of Microsystems and Nanotechnology.- Information Electronics Of Nano-era -- Micro/Nano Fluidics -- Materials Problems in MEMS -- Nanomechanics in Crossed Multidiscipline -- Nano Structure and Monomolecular Electronic Transport Feature -- Nanomaterials structural Analysis and Attribute -- Part 2.Microsystems -- MEMS Introduction -- Micro Electromechanical Sensor -- Microactuator -- MEMS Design -- MEMS Processing and Fabrication Techniques and Technology -- Optical MEMS and Nano-Photonics -- Introduction of MEMS Packaging -- Part 3.Nanotechnology.- Nanotube , Nanoware , Nanobelt -- Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod -- The Application of STM and AFM in Nano Process and Fabrication -- Nanoscale Fabrication -- Integration Nanotechnology based on MEMS Manufacture Technology -- Part 4.Microsystems and Nanotechnology Application -- MEMS Application -- Micro-electromechanical Sensor System -- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry -- MEMS in Automobile -- Biochips -- Nanotechnology in Biological and Medical Applications -- Part 5.Development and Prospect -- Development and Prospect. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Materials Science. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wang, Zhonglin. |
| Relator term | editor. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lin, Liwei. |
| Relator term | editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY | |
| Title | Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Printed edition: |
| International Standard Book Number | 9783642182921 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://dx.doi.org/10.1007/978-3-642-18293-8 |
| 912 ## - | |
| -- | ZDB-2-CMS |
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