Ukita, Hiroo.
Micromechanical Photonics [electronic resource] / by Hiroo Ukita. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2006. - digital. - Microtechnology and Mems, 1615-8326 . - Microtechnology and Mems, .
9783540313724
10.1007/978-3-540-31372-4 doi
Physics.
Mechanics.
Physical optics.
Microwaves.
Physics.
Applied Optics, Optoelectronics, Optical Devices.
Mechanics.
Physics and Applied Physics in Engineering.
Microwaves, RF and Optical Engineering.
Micromechanical Photonics [electronic resource] / by Hiroo Ukita. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2006. - digital. - Microtechnology and Mems, 1615-8326 . - Microtechnology and Mems, .
9783540313724
10.1007/978-3-540-31372-4 doi
Physics.
Mechanics.
Physical optics.
Microwaves.
Physics.
Applied Optics, Optoelectronics, Optical Devices.
Mechanics.
Physics and Applied Physics in Engineering.
Microwaves, RF and Optical Engineering.