Ghodssi, Reza.
MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin. - Boston, MA : Springer US, 2011. - digital. - MEMS Reference Shelf, 1936-4407 . - MEMS Reference Shelf, .
9780387473185
10.1007/978-0-387-47318-5 doi
Engineering.
Electronics.
Systems engineering.
Materials.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Materials Science, general.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
TK7800-8360 TK7874-7874.9
621.381
MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin. - Boston, MA : Springer US, 2011. - digital. - MEMS Reference Shelf, 1936-4407 . - MEMS Reference Shelf, .
9780387473185
10.1007/978-0-387-47318-5 doi
Engineering.
Electronics.
Systems engineering.
Materials.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Materials Science, general.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
TK7800-8360 TK7874-7874.9
621.381