Adams, Thomas M.
Introductory MEMS Fabrication and Applications / [electronic resource] : by Thomas M. Adams, Richard A. Layton. - 1. - Boston, MA : Springer US, 2010. - digital.
9780387095110
10.1007/978-0-387-09511-0 doi
Engineering.
Mechanics.
Materials.
Electronics.
Systems engineering.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Mechanics.
Surfaces and Interfaces, Thin Films.
Continuum Mechanics and Mechanics of Materials.
TK7800-8360 TK7874-7874.9
621.381
Introductory MEMS Fabrication and Applications / [electronic resource] : by Thomas M. Adams, Richard A. Layton. - 1. - Boston, MA : Springer US, 2010. - digital.
9780387095110
10.1007/978-0-387-09511-0 doi
Engineering.
Mechanics.
Materials.
Electronics.
Systems engineering.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Mechanics.
Surfaces and Interfaces, Thin Films.
Continuum Mechanics and Mechanics of Materials.
TK7800-8360 TK7874-7874.9
621.381