Semiconductor technology : processing and novel fabrication techniques /
edited by Mikhail Levinshtein, Michael S. Shur.
- New York : Wiley, c1997.
- xviii, 240 p. : ill. ; 24 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471127922 (cloth : acidfree paper)
97001734
Semiconductors.
Semiconductor doping.
Semiconductors--Defects.
TK7871.85 / .S4453 1997
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471127922 (cloth : acidfree paper)
97001734
Semiconductors.
Semiconductor doping.
Semiconductors--Defects.
TK7871.85 / .S4453 1997